Kelvin Probe Force Microscopy (KPFM) is a tool that enables nanometer-scale imaging of the surface potential on a broad range of materials. KPFM measurements require an understanding of both the details of the instruments and the physics of the measurements to obtain optimal results.

Kelvin probe force microscopy, or KPFM, was introduced as a tool to measure the local contact potential difference between a conducting atomic force microscopy (AFM) tip and the sample, thereby mapping the work function or surface potential of the sample with high spatial resolution. KPFM has been used extensively as a unique method to characterize the nano-scale electronic/electrical properties of metal/semiconductor surfaces and semiconductor devices. Recently, KPFM has also been used to study the electrical properties of organic materials/devices and biological materials.