Atomic force microscopy analysis of surface topography of pure thin aluminum films

Paper summary

This article is about surface analysis of pure aluminum thin films by AFM and films were deposited on stainless and mild steel substrates through rf magnetron sputtering at rf powers of 150 and 200 W and the result of this article shows that the morphologies of the surface structures of Al films vary with power and substrate type.

Journal : Materials Research Express

Publiosh Date : 28 April 2018

Paper link

Atomic force microscopy analysis of surface topography of pure thin aluminum films